Products

The EUV Photomask — the pattern behind every leading-edge chip.

Astrileux designs and produces extreme ultraviolet photomasks: the reflective, multilayer-coated reticles that carry a chip's circuit pattern into the lithography tool. It's a single point of failure for the entire process — and a single point of leverage for performance.

EUV Photomask Platform

Built for sub-3nm production.

Every layer of an advanced logic or memory chip starts as a pattern on a mask. At EUV wavelengths, that mask has to be defect-free at a scale measured in atoms — a multilayer mirror stack, an absorber pattern, and a pellicle protecting it all from a single stray particle that could ruin an entire wafer lot.

Exposure Wavelength13.5nm (EUV)
Target Process NodesSub-3nm logic & advanced memory
SubstrateLow thermal expansion multilayer blank
Defect ToleranceZero-defect actinic inspection standard
ProtectionEUV pellicle, contamination-controlled handling
Rendering of an EUV photomask on an inspection stage inside a cleanroom fabrication facility
On-Orbit R&D
International Space Station emblem ISS National Laboratory Program

AI's blueprint, made in space.

Astrileux is pursuing superior material science in microgravity aboard the International Space Station National Laboratory, in partnership with CASIS — opening a research path that isn't available in any terrestrial cleanroom.

The goal: build on the pillars of chip manufacturing at the leading edge, enabling new semiconductor manufacturing space across the spectrum. Astrileux's extended team are pioneers of materials manufacturing in space.

See our space program partners
Chips are designed on Earth. Increasingly, we believe part of how they're made could be refined off it.
Why Space

Three ways the ISS program advances the work.

Materials Science

Superior material science, off-Earth

Microgravity offers conditions no terrestrial cleanroom can replicate — a new frontier for advancing the materials science behind leading-edge chipmaking.

Leading-Edge Manufacturing

A new pillar of chip manufacturing

On-orbit materials work stands alongside Astrileux's terrestrial photomask program as another pillar of chip manufacturing at the leading edge.

Future Manufacturing

What does this mean for AI hardware?

As this research matures, it enables new semiconductor manufacturing space across the spectrum — from photomasks to future materials platforms powering AI hardware.

Next

Meet the partners funding this work.

NSF, NASA, CASIS, Draper & E2MC